2015-Sustainable Industrial Processing Summit
SIPS 2015 Volume 6: Coatings, Cement, Rare Earth & Ferro-alloys

Editors:Kongoli F, Yildirim H, Hainer S, Hofmann K, Proske T, Graubner C.A., Albert B
Publisher:Flogen Star OUTREACH
Publication Year:2015
Pages:200 pages
ISBN:978-1-987820-29-4
ISSN:2291-1227 (Metals and Materials Processing in a Clean Environment Series)
CD-SIPS2015_Volume
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    Deposition Characteristics of TiO2 Thin Films Prepared by DC Pulsed Magnetron Sputtering

    Seong-Bo Heo1; Kyu-Sik Kim1; Eunsol An1; Uoo-Chang Jung1; In-Wook Park1;
    1KITECH, Yangsan, Korea (Republic of [South] Korea);
    Type of Paper: Regular
    Id Paper: 446
    Topic: 19

    Abstract:

    This study reports a fabrication of TiO2 on the surface of dental implants by pulsed D.C. magnetron sputtering from a Ti target. A systematic investigation on the microstructure and mechanical properties of TiO2 films was carried out with the variation of O2 contents and substrate temperatures. The effects of deposition parameters on the fabricated structures were investigated by X-ray diffraction (XRD) technique and field emission scanning electron microscope (FE-SEM). Hydrophilic properties were evaluated by measuring water contact angles on the film surface. By increasing O2 contents up to 40%, surface roughness of TiO2 film increased while a relatively smooth surface was obtained with 50% O2 contents. Surface roughness and adhesion strength both increased as substrate temperature increased up to 200C. From these results, hydrophilic and adhesive properties of the present TiO2 films synthesized with 40% O2 at 200C regarded to be suitable for biocompatible applications.

    Keywords:

    Coatings; Surface; Wear;

    Cite this article as:

    Heo S, Kim K, An E, Jung U, Park I. Deposition Characteristics of TiO2 Thin Films Prepared by DC Pulsed Magnetron Sputtering. In: Kongoli F, Yildirim H, Hainer S, Hofmann K, Proske T, Graubner C.A., Albert B, editors. Sustainable Industrial Processing Summit SIPS 2015 Volume 6: Coatings, Cement, Rare Earth & Ferro-alloys. Volume 6. Montreal(Canada): FLOGEN Star Outreach. 2015. p. 187-188.