2016-Sustainable Industrial Processing Summit
SIPS 2016 Volume 11: Physics, Advanced/Multifunctional Materials, Composite, Quasi-crystals, Coating
| Editors: | Kongoli F, Marquis F, Lu L, Xia H, Masset P, Rokicki P |
| Publisher: | Flogen Star OUTREACH |
| Publication Year: | 2016 |
| Pages: | 180 pages |
| ISBN: | 978-1-987820-56-0 |
| ISSN: | 2291-1227 (Metals and Materials Processing in a Clean Environment Series) |
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Study on nano TiB2 coatings deposited by CVD
Xiaoxiao Huang1; Shuchen Sun1; Shuaidan Lu1; Xiaoping Zhu1;1NORTHEASTERN UNIVERSITY, Shenyang, China;
Type of Paper: Regular
Id Paper: 411
Topic: 18
Abstract:
The coatings of titanium dibordie (TiB2) on a high purity graphite substrate by chemical vapor deposition (CVD) were studied in this paper. The TiB2 was synthesized by using a gas mixture of TiCl4, BCl3 and H2. The properties and microstructure of TiB2 coatings were investigated by changing the factor of gas flow ratio of TiCl4 / BCl3. It was revealed that the grain sizes of TiB2 coatings were about 10-80 nm, which determined by X-ray diffraction, field emission scanning electron microscopy and transmission electron microscope. The analyzed results also illustrated that the grain size increased with the increasing of the gas flow ratio of TiCl4 / BCl3. Furthermore, the coatings grow faster, the grain size of TiB2 become large, the crystal plane of (001) and (110) develop slowly. The micro hardness of TiB2 coatings is different when the gas flow ratio of TiCl4 / BCl3 is changing. The more gas flow ratio is, the higher micro hardness is.