2015 - Sustainable Industrial Processing Summit & Exhibition
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4 - 9 October 2015, Cornelia Diamond Golf Resort & Spa, Antalya, Turkey
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ADVANCE PROGRAM
Oral | Summit Plenary | Round Table | Poster | Author Index

     

ORAL

SESSION: PhysicsMonPM 1st Intl. Symp. on Physics of Surfaces and Interfaces, from Fundamentals to Sustainable Applications
Mon Oct, 05 2015Room: Onyx
Session Chairs: Isabelle Braems;

02:40 PM: [PhysicsMonPM7] Invited
Reactive Diffusion For Contact Formation In Advanced Mos Devices
D. Mangelinck1 ;K. Hoummada2 ;M. El Kousseifi2 ;F. Panciera2 ;M. Descoins2 ;M. Bertoglio2 ;T. Epicier3 ;M. Gregoire4 ;1IM2NP-CNRS-AMU, Marseille cedex 20, France; 2IM2NP-CNRS-AMU, Marseille, France; 3MATEIS, UMR 5510, Villeurbanne, France; 4STMicrolectronics, Crolles, France;